Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak
Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography
DAC, 2015.
@inproceedings{DAC-2015-DingCM,
author = "Yixiao Ding and Chris C. N. Chu and Wai-Kei Mak",
booktitle = "{Proceedings of the 52nd Annual Design Automation Conference}",
doi = "10.1145/2744769.2744821",
isbn = "978-1-4503-3520-1",
pages = "6",
publisher = "{ACM}",
title = "{Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography}",
year = 2015,
}











