Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak
Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography
DAC, 2015.
@inproceedings{DAC-2015-DingCM, author = "Yixiao Ding and Chris C. N. Chu and Wai-Kei Mak", booktitle = "{Proceedings of the 52nd Annual Design Automation Conference}", doi = "10.1145/2744769.2744821", isbn = "978-1-4503-3520-1", pages = "6", publisher = "{ACM}", title = "{Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography}", year = 2015, }