Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography
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Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak
Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography
DAC, 2015.

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@inproceedings{DAC-2015-DingCM,
	author        = "Yixiao Ding and Chris C. N. Chu and Wai-Kei Mak",
	booktitle     = "{Proceedings of the 52nd Annual Design Automation Conference}",
	doi           = "10.1145/2744769.2744821",
	isbn          = "978-1-4503-3520-1",
	pages         = "6",
	publisher     = "{ACM}",
	title         = "{Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography}",
	year          = 2015,
}

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