Lars Liebmann, Jennifer Lund, Fook-Luen Heng, Ioana Graur
Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate Level: Design Rules and Design Rule Checking
DAC, 2001.
@inproceedings{DAC-2001-LiebmannLHG,
author = "Lars Liebmann and Jennifer Lund and Fook-Luen Heng and Ioana Graur",
booktitle = "{Proceedings of the 38th Design Automation Conference}",
doi = "10.1145/378239.378333",
isbn = "1-58113-297-2",
pages = "79--84",
publisher = "{ACM}",
title = "{Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate Level: Design Rules and Design Rule Checking}",
year = 2001,
}