Yun Ye, Frank Liu, Min Chen, Yu Cao
Variability analysis under layout pattern-dependent rapid-thermal annealing process
DAC, 2009.
@inproceedings{DAC-2009-YeLCC,
author = "Yun Ye and Frank Liu and Min Chen and Yu Cao",
booktitle = "{Proceedings of the 46th Design Automation Conference}",
doi = "10.1145/1629911.1630054",
isbn = "978-1-60558-497-3",
pages = "551--556",
publisher = "{ACM}",
title = "{Variability analysis under layout pattern-dependent rapid-thermal annealing process}",
year = 2009,
}











