Used together with:
layout
(1)
spacer
(1)
flexibl
(1)
decomposit
(1)
lithographi
(1)
Stem
patter$ (
all stems
)
1 papers:
DAC-2011-BanLP
#2d
#composition
#flexibility
#framework
#layout
Flexible 2D layout decomposition framework for spacer-type double pattering lithography (
YB
,
KL
,
DZP
), pp. 789–794.
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