@inproceedings{CASE-2012-Chang,
	author        = "Yaw-Jen Chang",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386497",
	isbn          = "978-1-4673-0429-0",
	pages         = "491--496",
	publisher     = "{IEEE}",
	title         = "{Fault detection for plasma-enhanced chemical vapor deposition process using feature extraction}",
	year          = 2012,
}