@inproceedings{CASE-2012-YumKK,
	author        = "Bong-Jin Yum and Jae Hoon Koo and Seong-Jun Kim",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386471",
	isbn          = "978-1-4673-0429-0",
	pages         = "86--90",
	publisher     = "{IEEE}",
	title         = "{Analysis of defective patterns on wafers in semiconductor manufacturing: A bibliographical review}",
	year          = 2012,
}