@inproceedings{CASE-2014-PampuriSWJOM,
	author        = "Simone Pampuri and Gian Antonio Susto and Jian Wan and Adrian B. Johnston and Paul G. O'Hara and Seán F. McLoone",
	booktitle     = "{Proceedings of the 10th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2014.6899415",
	pages         = "786--791",
	publisher     = "{IEEE}",
	title         = "{Insight extraction for semiconductor manufacturing processes}",
	year          = 2014,
}