Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
CASE, 2014.
@inproceedings{CASE-2014-YugmaBDV, author = "Claude Yugma and Jakey Blue and Stéphane Dauzère-Pérès and Philippe Vialletelle", booktitle = "{Proceedings of the 10th International Conference on Automation Science and Engineering}", doi = "10.1109/CoASE.2014.6899310", pages = "93--98", publisher = "{IEEE}", title = "{Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook}", year = 2014, }