Big data analytic for multivariate fault detection and classification in semiconductor manufacturing
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Ying-Jen Chen, Bo-Cheng Wang, Jei-Zheng Wu, Yi-Chia Wu, Chen-Fu Chien
Big data analytic for multivariate fault detection and classification in semiconductor manufacturing
CASE, 2017.

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@inproceedings{CASE-2017-ChenWWWC,
	author        = "Ying-Jen Chen and Bo-Cheng Wang and Jei-Zheng Wu and Yi-Chia Wu and Chen-Fu Chien",
	booktitle     = "{Proceedings of the 13th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2017.8256190",
	isbn          = "978-1-5090-6781-7",
	pages         = "731--736",
	publisher     = "{IEEE}",
	title         = "{Big data analytic for multivariate fault detection and classification in semiconductor manufacturing}",
	year          = 2017,
}

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