Daniel Jasper, Sergej Fatikow
Automated high-speed nanopositioning inside scanning electron microscopes
CASE, 2010.
@inproceedings{CASE-2010-JasperF,
author = "Daniel Jasper and Sergej Fatikow",
booktitle = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2010.5584075",
isbn = "978-1-4244-5447-1",
pages = "704--709",
publisher = "{IEEE}",
title = "{Automated high-speed nanopositioning inside scanning electron microscopes}",
year = 2010,
}











