@inproceedings{CASE-2011-QiaoWZ,
	author        = "Yan Qiao and Naiqi Wu and MengChu Zhou",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042403",
	isbn          = "978-1-4577-1730-7",
	pages         = "90--95",
	publisher     = "{IEEE}",
	title         = "{Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting}",
	year          = 2011,
}