Travelled to:
1 × Italy
1 × Korea
1 × Sweden
1 × Taiwan
1 × USA
Collaborated with:
M.Zhou N.Wu Q.Zhu F.Yang C.Pan R.Su Z.Li
Talks about:
cluster (11) tool (11) arm (9) schedul (8) wafer (7) singl (6) analysi (5) multi (5) revisit (4) petri (4)
Person: Yan Qiao
DBLP: Qiao:Yan
Contributed to:
Wrote 11 papers:
- CASE-2015-PanZQ #clustering #how #process #tool support
- How to start-up dual-arm cluster tools involving a wafer revisiting process (CP, MZ, YQ), pp. 1194–1199.
- CASE-2015-ZhuQZ #clustering #modelling #multi #petri net #scheduling #tool support
- Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools (QZ, YQ, MZ), pp. 292–297.
- CASE-2014-YangWQZ #clustering #multi #scheduling #tool support
- Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules (FY, NW, YQ, MZ), pp. 75–80.
- CASE-2014-ZhuWQZ #analysis #clustering #constraints #modelling #multi #petri net #scheduling #tool support
- Modeling and schedulability analysis of single-arm multi-cluster tools with residency time constraints via Petri nets (QZ, NW, YQ, MZ), pp. 81–86.
- CASE-2013-QiaoWZ #clustering #scheduling #tool support
- Scheduling of time constrained dual-arm cluster tools with wafer revisiting (YQ, NW, MZ), pp. 868–873.
- CASE-2013-ZhuWQZ #clustering #modelling #multi #petri net #scheduling #tool support
- Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools (QZ, NW, YQ, MZ), pp. 862–867.
- CASE-2012-QiaoWZ #analysis #clustering #petri net #scheduling #tool support
- Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting (YQ, NW, MZ), pp. 206–211.
- CASE-2011-QiaoWZ #analysis #clustering #modelling #tool support
- Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting (YQ, NW, MZ), pp. 90–95.
- CASE-2016-QiaoZWZL #clustering #linear #optimisation #process #tool support
- Optimizing close-down processes of single-robot cluster tools via linear programing (YQ, MZ, NW, QZ, ZL), pp. 148–153.
- CASE-2016-YangWQZ #analysis #clustering #hybrid #multi #scheduling #tool support
- Optimal scheduling analysis of treelike hybrid multi-cluster tools (FY, NW, YQ, MZ), pp. 1400–1404.
- CASE-2018-YangWSQ #analysis #clustering #constraints #scheduling #tool support
- Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations (FY, NW, RS, YQ), pp. 241–246.