Bing Yan, Hsin Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang
Optimization-based litho machine scheduling with multiple reticles and setups
CASE, 2011.
@inproceedings{CASE-2011-YanCLWC, author = "Bing Yan and Hsin Yuan Chen and Peter B. Luh and Simon Wang and Joey Chang", booktitle = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}", doi = "10.1109/CASE.2011.6042516", isbn = "978-1-4577-1730-7", pages = "114--119", publisher = "{IEEE}", title = "{Optimization-based litho machine scheduling with multiple reticles and setups}", year = 2011, }