Stem litho$ (all stems)

4 papers:

CASE-2012-YanCLWC #scheduling

Optimization-based litho machine scheduling with load balancing and reticle expiration (BY, HYC, PBL, SW, JC), pp. 575–580.

DATE-2012-SharmaCAHCD #power management #variability

Ultra low power litho friendly local assist circuitry for variability resilient 8T SRAM (VS, SC, MA, JH, FC, WD), pp. 1042–1047.

CASE-2011-YanCLWC #multi #scheduling

Optimization-based litho machine scheduling with multiple reticles and setups (BY, HYC, PBL, SW, JC), pp. 114–119.

DAC-2007-TsaiZT #design #layout #modelling

Modeling Litho-Constrained Design Layout (MCT, DZ, ZT), pp. 354–357.