Dae-Kyu Kim, Tae-Eog Lee, Hyun-Jung Kim
Optimal scheduling of transient cycles for single-armed cluster tools
CASE, 2013.
@inproceedings{CASE-2013-KimLK, author = "Dae-Kyu Kim and Tae-Eog Lee and Hyun-Jung Kim", booktitle = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}", doi = "10.1109/CoASE.2013.6653939", pages = "874--879", publisher = "{IEEE}", title = "{Optimal scheduling of transient cycles for single-armed cluster tools}", year = 2013, }