Yan Qiao, Naiqi Wu, MengChu Zhou
Scheduling of time constrained dual-arm cluster tools with wafer revisiting
CASE, 2013.
@inproceedings{CASE-2013-QiaoWZ, author = "Yan Qiao and Naiqi Wu and MengChu Zhou", booktitle = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}", doi = "10.1109/CoASE.2013.6653916", pages = "868--873", publisher = "{IEEE}", title = "{Scheduling of time constrained dual-arm cluster tools with wafer revisiting}", year = 2013, }