Scheduling of time constrained dual-arm cluster tools with wafer revisiting
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Yan Qiao, Naiqi Wu, MengChu Zhou
Scheduling of time constrained dual-arm cluster tools with wafer revisiting
CASE, 2013.

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@inproceedings{CASE-2013-QiaoWZ,
	author        = "Yan Qiao and Naiqi Wu and MengChu Zhou",
	booktitle     = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2013.6653916",
	pages         = "868--873",
	publisher     = "{IEEE}",
	title         = "{Scheduling of time constrained dual-arm cluster tools with wafer revisiting}",
	year          = 2013,
}

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