@inproceedings{CASE-2015-YuWZT,
	author        = "Xiaowen Yu and Cong Wang and Yu Zhao and Masayoshi Tomizuka",
	booktitle     = "{Proceedings of the 11th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2015.7294150",
	isbn          = "978-1-4673-8183-3",
	pages         = "640--646",
	publisher     = "{IEEE}",
	title         = "{Controller design and optimal tuning of a wafer handling robot}",
	year          = 2015,
}