Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule
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Dong-Hyun Roh, Tae-Eog Lee
Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule
CASE, 2018.

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@inproceedings{CASE-2018-RohL,
	author        = "Dong-Hyun Roh and Tae-Eog Lee",
	booktitle     = "{Proceedings of the 14th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2018.8560521",
	isbn          = "978-1-5386-3593-3",
	pages         = "1562--1567",
	publisher     = "{IEEE}",
	title         = "{Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule}",
	year          = 2018,
}

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