Dong-Hyun Roh, Tae-Eog Lee
Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule
CASE, 2018.
@inproceedings{CASE-2018-RohL, author = "Dong-Hyun Roh and Tae-Eog Lee", booktitle = "{Proceedings of the 14th International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2018.8560521", isbn = "978-1-5386-3593-3", pages = "1562--1567", publisher = "{IEEE}", title = "{Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule}", year = 2018, }