Andrew B. Kahng, Y. C. Pati
Subwavelength Lithography and Its Potential Impact on Design and EDA
DAC, 1999.
@inproceedings{DAC-1999-KahngP, author = "Andrew B. Kahng and Y. C. Pati", booktitle = "{Proceedings of the 36th Design Automation Conference}", doi = "10.1145/309847.310072", pages = "799--804", publisher = "{ACM Press}", title = "{Subwavelength Lithography and Its Potential Impact on Design and EDA}", year = 1999, }