Variability analysis under layout pattern-dependent rapid-thermal annealing process
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Yun Ye, Frank Liu, Min Chen, Yu Cao
Variability analysis under layout pattern-dependent rapid-thermal annealing process
DAC, 2009.

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@inproceedings{DAC-2009-YeLCC,
	author        = "Yun Ye and Frank Liu and Min Chen and Yu Cao",
	booktitle     = "{Proceedings of the 46th Design Automation Conference}",
	doi           = "10.1145/1629911.1630054",
	isbn          = "978-1-60558-497-3",
	pages         = "551--556",
	publisher     = "{ACM}",
	title         = "{Variability analysis under layout pattern-dependent rapid-thermal annealing process}",
	year          = 2009,
}

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