Shao-Yun Fang, Iou-Jen Liu, Yao-Wen Chang
Stitch-aware routing for multiple e-beam lithography
DAC, 2013.
@inproceedings{DAC-2013-FangLC,
author = "Shao-Yun Fang and Iou-Jen Liu and Yao-Wen Chang",
booktitle = "{Proceedings of the 50th Annual Design Automation Conference}",
doi = "10.1145/2463209.2488765",
isbn = "978-1-4503-2071-9",
pages = "6",
publisher = "{ACM}",
title = "{Stitch-aware routing for multiple e-beam lithography}",
year = 2013,
}











