Stitch-aware routing for multiple e-beam lithography
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Shao-Yun Fang, Iou-Jen Liu, Yao-Wen Chang
Stitch-aware routing for multiple e-beam lithography
DAC, 2013.

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@inproceedings{DAC-2013-FangLC,
	author        = "Shao-Yun Fang and Iou-Jen Liu and Yao-Wen Chang",
	booktitle     = "{Proceedings of the 50th Annual Design Automation Conference}",
	doi           = "10.1145/2463209.2488765",
	isbn          = "978-1-4503-2071-9",
	pages         = "6",
	publisher     = "{ACM}",
	title         = "{Stitch-aware routing for multiple e-beam lithography}",
	year          = 2013,
}

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