Shao-Yun Fang, Iou-Jen Liu, Yao-Wen Chang
Stitch-aware routing for multiple e-beam lithography
DAC, 2013.
@inproceedings{DAC-2013-FangLC, author = "Shao-Yun Fang and Iou-Jen Liu and Yao-Wen Chang", booktitle = "{Proceedings of the 50th Annual Design Automation Conference}", doi = "10.1145/2463209.2488765", isbn = "978-1-4503-2071-9", pages = "6", publisher = "{ACM}", title = "{Stitch-aware routing for multiple e-beam lithography}", year = 2013, }