Travelled to:
1 × USA
Collaborated with:
Y.Chang S.Fang
Talks about:
manufactur (1) challeng (1) solut (1) beam (1) euv (1)
Person: Ru-Gun Liu
DBLP: Liu:Ru=Gun
Contributed to:
Wrote 1 papers:
- DAC-2015-ChangLF #challenge
- EUV and e-beam manufacturability: challenges and solutions (YWC, RGL, SYF), p. 6.