Bram van der Sanden, Michel A. Reniers, Marc Geilen, Twan Basten, Johan Jacobs, Jeroen Voeten, Ramon R. H. Schiffelers
Modular model-based supervisory controller design for wafer logistics in lithography machines
MoDELS, 2015.
@inproceedings{MoDELS-2015-SandenRGBJVS,
author = "Bram van der Sanden and Michel A. Reniers and Marc Geilen and Twan Basten and Johan Jacobs and Jeroen Voeten and Ramon R. H. Schiffelers",
booktitle = "{Proceedings of the 18th International Conference on Model Driven Engineering Languages and Systems}",
doi = "10.1109/MODELS.2015.7338273",
isbn = "978-1-4673-6908-4",
pages = "416--425",
publisher = "{IEEE}",
title = "{Modular model-based supervisory controller design for wafer logistics in lithography machines}",
year = 2015,
}