Collaborated with:M.A.Reniers M.Geilen T.Basten J.Jacobs J.Voeten R.R.H.Schiffelers
Talks about:supervisori (1) lithographi (1) modular (1) control (1) machin (1) logist (1) design (1) wafer (1) model (1) base (1)
Person: Bram van der Sanden
DBLP: Sanden:Bram_van_der
Contributed to:
2015Wrote 1 papers:
- MoDELS-2015-SandenRGBJVS #composition #design #modelling
- Modular model-based supervisory controller design for wafer logistics in lithography machines (BvdS, MAR, MG, TB, JJ, JV, RRHS), pp. 416–425.