BibSLEIGH corpus
BibSLEIGH tags
BibSLEIGH bundles
BibSLEIGH people
Open Knowledge
XHTML 1.0 W3C Rec
CSS 2.1 W3C CanRec
email twitter
Travelled to:
1 × USA
Collaborated with:
Talks about:
photolithographi (1) throughput (1) intrins (1) cluster (1) advanc (1) wafer (1) equip (1) tool (1) loss (1)

Person: Maruthi Kumar Mutnuri

DBLP DBLP: Mutnuri:Maruthi_Kumar

Contributed to:

CASE 20072007

Wrote 1 papers:

CASE-2007-MorrisonM #clustering #on the #throughput #tool support
On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss (JRM, MKM), pp. 88–93.

Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.