Optimization-based litho machine scheduling with load balancing and reticle expiration
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Bing Yan, Hsin Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang
Optimization-based litho machine scheduling with load balancing and reticle expiration
CASE, 2012.

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@inproceedings{CASE-2012-YanCLWC,
	author        = "Bing Yan and Hsin Yuan Chen and Peter B. Luh and Simon Wang and Joey Chang",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386493",
	isbn          = "978-1-4673-0429-0",
	pages         = "575--580",
	publisher     = "{IEEE}",
	title         = "{Optimization-based litho machine scheduling with load balancing and reticle expiration}",
	year          = 2012,
}

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