Travelled to:
1 × USA
Collaborated with:
Y.Ban D.Z.Pan
Talks about:
lithographi (1) decomposit (1) framework (1) flexibl (1) spacer (1) patter (1) layout (1) doubl (1) type (1)
Person: Kevin Lucas
DBLP: Lucas:Kevin
Contributed to:
Wrote 1 papers:
- DAC-2011-BanLP #2d #composition #flexibility #framework #layout
- Flexible 2D layout decomposition framework for spacer-type double pattering lithography (YB, KL, DZP), pp. 789–794.