A novel approach to scheduling of single-arm cluster tools with wafer revisiting
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Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou
A novel approach to scheduling of single-arm cluster tools with wafer revisiting
CASE, 2009.

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@inproceedings{CASE-2009-WuCCZ,
	author        = "Naiqi Wu and Feng Chu and Chengbin Chu and MengChu Zhou",
	booktitle     = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2009.5234146",
	isbn          = "978-1-4244-4578-3",
	pages         = "567--572",
	publisher     = "{IEEE}",
	title         = "{A novel approach to scheduling of single-arm cluster tools with wafer revisiting}",
	year          = 2009,
}

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