Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou
A novel approach to scheduling of single-arm cluster tools with wafer revisiting
CASE, 2009.
@inproceedings{CASE-2009-WuCCZ, author = "Naiqi Wu and Feng Chu and Chengbin Chu and MengChu Zhou", booktitle = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2009.5234146", isbn = "978-1-4244-4578-3", pages = "567--572", publisher = "{IEEE}", title = "{A novel approach to scheduling of single-arm cluster tools with wafer revisiting}", year = 2009, }