Hendrik Purwins, Ahmed Nagi, Bernd Barak, Uwe Hockele, Andreas Kyek, Benjamin Lenz, Gunter Pfeifer, Kurt Weinzierl
Regression methods for prediction of PECVD Silicon Nitride layer thickness
CASE, 2011.
@inproceedings{CASE-2011-PurwinsNBHKLPW,
author = "Hendrik Purwins and Ahmed Nagi and Bernd Barak and Uwe Hockele and Andreas Kyek and Benjamin Lenz and Gunter Pfeifer and Kurt Weinzierl",
booktitle = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
doi = "10.1109/CASE.2011.6042426",
isbn = "978-1-4577-1730-7",
pages = "387--392",
publisher = "{IEEE}",
title = "{Regression methods for prediction of PECVD Silicon Nitride layer thickness}",
year = 2011,
}