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Travelled to:
1 × Italy
Collaborated with:
H.Purwins A.Nagi B.Barak A.Kyek B.Lenz G.Pfeifer K.Weinzierl
Talks about:
silicon (1) regress (1) predict (1) nitrid (1) method (1) thick (1) pecvd (1) layer (1)

Person: Uwe Hockele

DBLP DBLP: Hockele:Uwe

Contributed to:

CASE 20112011

Wrote 1 papers:

CASE-2011-PurwinsNBHKLPW #predict
Regression methods for prediction of PECVD Silicon Nitride layer thickness (HP, AN, BB, UH, AK, BL, GP, KW), pp. 387–392.
Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
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