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Travelled to:
1 × Italy
Collaborated with:
H.Purwins A.Nagi B.Barak U.Hockele A.Kyek G.Pfeifer K.Weinzierl
Talks about:
silicon (1) regress (1) predict (1) nitrid (1) method (1) thick (1) pecvd (1) layer (1)

Person: Benjamin Lenz

DBLP DBLP: Lenz:Benjamin

Contributed to:

CASE 20112011

Wrote 1 papers:

CASE-2011-PurwinsNBHKLPW #predict
Regression methods for prediction of PECVD Silicon Nitride layer thickness (HP, AN, BB, UH, AK, BL, GP, KW), pp. 387–392.
Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
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