Travelled to:
1 × Italy
Collaborated with:
H.Purwins A.Nagi B.Barak U.Hockele A.Kyek B.Lenz K.Weinzierl
Talks about:
silicon (1) regress (1) predict (1) nitrid (1) method (1) thick (1) pecvd (1) layer (1)
Person: Gunter Pfeifer
DBLP: Pfeifer:Gunter
Contributed to:
Wrote 1 papers:
- CASE-2011-PurwinsNBHKLPW #predict
- Regression methods for prediction of PECVD Silicon Nitride layer thickness (HP, AN, BB, UH, AK, BL, GP, KW), pp. 387–392.