@inproceedings{CASE-2012-QiaoWZ,
	author        = "Yan Qiao and Naiqi Wu and MengChu Zhou",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386329",
	isbn          = "978-1-4673-0429-0",
	pages         = "206--211",
	publisher     = "{IEEE}",
	title         = "{Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting}",
	year          = 2012,
}