Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints
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Hong-Yue Jin, James R. Morrison
Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints
CASE, 2013.

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@inproceedings{CASE-2013-JinM,
	author        = "Hong-Yue Jin and James R. Morrison",
	booktitle     = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2013.6653901",
	pages         = "856--861",
	publisher     = "{IEEE}",
	title         = "{Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints}",
	year          = 2013,
}

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