Hong-Yue Jin, James R. Morrison
Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints
CASE, 2013.
@inproceedings{CASE-2013-JinM, author = "Hong-Yue Jin and James R. Morrison", booktitle = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}", doi = "10.1109/CoASE.2013.6653901", pages = "856--861", publisher = "{IEEE}", title = "{Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints}", year = 2013, }