@inproceedings{CASE-2013-ZhuWQZ,
	author        = "Qinghua Zhu and Naiqi Wu and Yan Qiao and MengChu Zhou",
	booktitle     = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2013.6653915",
	pages         = "862--867",
	publisher     = "{IEEE}",
	title         = "{Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools}",
	year          = 2013,
}