@inproceedings{CASE-2015-ZhuQZ,
	author        = "Qinghua Zhu and Yan Qiao and MengChu Zhou",
	booktitle     = "{Proceedings of the 11th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2015.7294094",
	isbn          = "978-1-4673-8183-3",
	pages         = "292--297",
	publisher     = "{IEEE}",
	title         = "{Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools}",
	year          = 2015,
}