Yuting Kong, Dong Ni
A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits
CASE, 2017.
@inproceedings{CASE-2017-KongN,
author = "Yuting Kong and Dong Ni",
booktitle = "{Proceedings of the 13th International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2017.8256193",
isbn = "978-1-5090-6781-7",
pages = "744--749",
publisher = "{IEEE}",
title = "{A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits}",
year = 2017,
}











