Yuting Kong, Dong Ni
A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits
CASE, 2017.
@inproceedings{CASE-2017-KongN, author = "Yuting Kong and Dong Ni", booktitle = "{Proceedings of the 13th International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2017.8256193", isbn = "978-1-5090-6781-7", pages = "744--749", publisher = "{IEEE}", title = "{A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits}", year = 2017, }