Travelled to:
1 × USA
Collaborated with:
H.K.Chiang Y.Chang J.R.Jiang
Talks about:
simultan (1) control (1) variat (1) dummif (1) minim (1) flare (1) coupl (1) awar (1) euv (1) cmp (1)
Person: Chi-Yuan Liu
DBLP: Liu:Chi=Yuan
Contributed to:
Wrote 1 papers:
- DAC-2014-LiuCCJ
- Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification (CYL, HJKC, YWC, JHRJ), p. 6.