Yuelin Du, Qiang Ma, Hua Song, James Shiely, Gerard Luk-Pat, Alexander Miloslavsky, Martin D. F. Wong
Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography
DAC, 2013.
@inproceedings{DAC-2013-Du0SSLMW, author = "Yuelin Du and Qiang Ma and Hua Song and James Shiely and Gerard Luk-Pat and Alexander Miloslavsky and Martin D. F. Wong", booktitle = "{Proceedings of the 50th Annual Design Automation Conference}", doi = "10.1145/2463209.2488848", isbn = "978-1-4503-2071-9", pages = "6", publisher = "{ACM}", title = "{Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography}", year = 2013, }