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Travelled to:
1 × USA
Collaborated with:
Y.Du Q.Ma H.Song G.Luk-Pat A.Miloslavsky M.D.F.Wong
Talks about:
lithographi (1) compliant (1) dielectr (1) pattern (1) spacer (1) detail (1) doubl (1) align (1) self (1) rout (1)

Person: James Shiely

DBLP DBLP: Shiely:James

Contributed to:

DAC 20132013

Wrote 1 papers:

DAC-2013-Du0SSLMW #self
Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography (YD, QM, HS, JS, GLP, AM, MDFW), p. 6.
Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.