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Travelled to:
4 × USA
Collaborated with:
Y.Chang I.Liu R.Liu W.Chen
Talks about:
lithographi (3) pattern (2) flare (2) rout (2) beam (2) awar (2) manufactur (1) decomposit (1) algorithm (1) simultan (1)

Person: Shao-Yun Fang

DBLP DBLP: Fang:Shao=Yun

Contributed to:

DAC 20152015
DAC 20142014
DAC 20132013
DAC 20122012

Wrote 5 papers:

DAC-2015-ChangLF #challenge
EUV and e-beam manufacturability: challenges and solutions (YWC, RGL, SYF), p. 6.
DAC-2014-LiuFC #process #self #using
Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process (IJL, SYF, YWC), p. 6.
DAC-2013-FangLC #multi
Stitch-aware routing for multiple e-beam lithography (SYF, IJL, YWC), p. 6.
DAC-2012-FangC
Simultaneous flare level and flare variation minimization with dummification in EUVL (SYF, YWC), pp. 1179–1184.
DAC-2012-FangCC #algorithm #composition #layout #novel
A novel layout decomposition algorithm for triple patterning lithography (SYF, YWC, WYC), pp. 1185–1190.

Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
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