Fang-Hsiang Su, Shi-Chung Chang, Chih-Min Fan, Ya-Jung Tsai, J. Jheng, Ching-Pin Kao, Chun-Yao Lu
A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing
CASE, 2009.
@inproceedings{CASE-2009-SuCFTJKL, author = "Fang-Hsiang Su and Shi-Chung Chang and Chih-Min Fan and Ya-Jung Tsai and J. Jheng and Ching-Pin Kao and Chun-Yao Lu", booktitle = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2009.5234086", isbn = "978-1-4244-4578-3", pages = "433--438", publisher = "{IEEE}", title = "{A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing}", year = 2009, }