@inproceedings{CASE-2011-LeeL,
	author        = "Jun-Ho Lee and Tae-Eog Lee",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042519",
	isbn          = "978-1-4577-1730-7",
	pages         = "102--107",
	publisher     = "{IEEE}",
	title         = "{Concurrent processing of multiple wafer types in a single-armed cluster tool}",
	year          = 2011,
}