FaJun Yang, Naiqi Wu, Liping Bai, MengChu Zhou
Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools
CASE, 2016.
@inproceedings{CASE-2016-YangWBZ,
author = "FaJun Yang and Naiqi Wu and Liping Bai and MengChu Zhou",
booktitle = "{Proceedings of the 12th International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2016.7743574",
isbn = "978-1-5090-2409-4",
pages = "1405--1410",
publisher = "{IEEE}",
title = "{Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools}",
year = 2016,
}











