Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing
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Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao
Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing
CASE, 2010.

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@inproceedings{CASE-2010-SchirruPN10a,
	author        = "Andrea Schirru and Simone Pampuri and Giuseppe De Nicolao",
	booktitle     = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2010.5584508",
	isbn          = "978-1-4244-5447-1",
	pages         = "57--62",
	publisher     = "{IEEE}",
	title         = "{Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing}",
	year          = 2010,
}

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