Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao
Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing
CASE, 2010.
@inproceedings{CASE-2010-SchirruPN10a, author = "Andrea Schirru and Simone Pampuri and Giuseppe De Nicolao", booktitle = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2010.5584508", isbn = "978-1-4244-5447-1", pages = "57--62", publisher = "{IEEE}", title = "{Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing}", year = 2010, }