`Travelled to:`

1 × Canada

1 × Italy

1 × Korea

1 × USA

`Collaborated with:`

S.Pampuri G.D.Nicolao G.A.Susto A.Beghi C.D.Luca G.Fazio D.Pagano S.F.McLoone

`Talks about:`

semiconductor (6) manufactur (6) process (4) metrolog (3) virtual (3) predict (3) mainten (3) multilevel (2) approach (2) control (2)

## Person: Andrea Schirru

### DBLP: Schirru:Andrea

### Contributed to:

### Wrote 7 papers:

- CASE-2013-SustoSPPMB #fault #maintenance #predict
- A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation (GAS, AS, SP, DP, SFM, AB), pp. 195–200.
- CASE-2012-PampuriSSLBN #multi #process
- Multistep virtual metrology approaches for semiconductor manufacturing processes (SP, AS, GAS, CDL, AB, GDN), pp. 91–96.
- CASE-2012-SustoSPNB #approach
- An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control (GAS, AS, SP, GDN, AB), pp. 358–363.
- CASE-2011-PampuriSFN #multi
- Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing (SP, AS, GF, GDN), pp. 244–249.
- CASE-2011-PampuriSLN #maintenance #predict
- Proportional hazard model with ℓ1 Penalization applied to Predictive Maintenance in semiconductor manufacturing (SP, AS, CDL, GDN), pp. 250–255.
- CASE-2010-SchirruPN #maintenance #predict #process #robust
- Particle filtering of hidden Gamma processes for robust Predictive Maintenance in semiconductor manufacturing (AS, SP, GDN), pp. 51–56.
- CASE-2010-SchirruPN10a #multi #process #statistics
- Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing (AS, SP, GDN), pp. 57–62.