Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing
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Simone Pampuri, Andrea Schirru, Giuseppe Fazio, Giuseppe De Nicolao
Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing
CASE, 2011.

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@inproceedings{CASE-2011-PampuriSFN,
	author        = "Simone Pampuri and Andrea Schirru and Giuseppe Fazio and Giuseppe De Nicolao",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042425",
	isbn          = "978-1-4577-1730-7",
	pages         = "244--249",
	publisher     = "{IEEE}",
	title         = "{Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing}",
	year          = 2011,
}

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